Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9758369 | Method for manufacturing a microphone structure and a pressure sensor structure in the layer structure of a MEMS element | Florian Schoen | 2017-09-12 |
| 9725300 | Capacitive MEMS-sensor element having bond pads for the electrical contacting of the measuring capacitor electrodes | Heiko Stahl, Arnim Hoechst, Rolf Scheben, Benedikt Stein | 2017-08-08 |