Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9758369 | Method for manufacturing a microphone structure and a pressure sensor structure in the layer structure of a MEMS element | Bernhard Gehl | 2017-09-12 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9758369 | Method for manufacturing a microphone structure and a pressure sensor structure in the layer structure of a MEMS element | Bernhard Gehl | 2017-09-12 |