Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9725300 | Capacitive MEMS-sensor element having bond pads for the electrical contacting of the measuring capacitor electrodes | Heiko Stahl, Arnim Hoechst, Bernhard Gehl, Rolf Scheben | 2017-08-08 |
| 9621996 | Micromechanical sound transducer system and a corresponding manufacturing method | Christoph Schelling, Michael Stumber, Theresa Lutz, Rolf Scheben | 2017-04-11 |