Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9841345 | Detection method and facility for checking sealed products for leaks | Julien Palisson, Philippe Bunod, Sylvain Rioufrays, Smail Hadj-Rabah | 2017-12-12 |
| 9810617 | Station and method for measuring particle contamination of a transport carrier for conveying and storing semiconductor substrates at atmospheric pressure | Cindy Thovex, Arnaud Favre | 2017-11-07 |
| 9779972 | Method and device for controlling the manufacture of semiconductor by measuring contamination | Arnaud Favre | 2017-10-03 |