Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9816974 | Station and method for measuring particle contamination of a transport carrier for conveying and storing semiconductor substrates at atmospheric pressure | Nicolas Chapel, Bertrand Bellet | 2017-11-14 |
| 9810617 | Station and method for measuring particle contamination of a transport carrier for conveying and storing semiconductor substrates at atmospheric pressure | Julien Bounouar, Arnaud Favre | 2017-11-07 |