Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9810617 | Station and method for measuring particle contamination of a transport carrier for conveying and storing semiconductor substrates at atmospheric pressure | Cindy Thovex, Julien Bounouar | 2017-11-07 |
| 9779972 | Method and device for controlling the manufacture of semiconductor by measuring contamination | Julien Bounouar | 2017-10-03 |
| 9599110 | Gas pumping and treatment device | Julien Palisson | 2017-03-21 |