Issued Patents 2017
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9834438 | Compensation and calibration for MEMS devices | Tehmoor M. Dar, Bruno J. Debeurre, Raimondo P. Sessego, Richard A. Deken, Krithivasan Suryanarayanan | 2017-12-05 |
| 9829406 | Differential capacitive output pressure sensor and method | Dubravka Bilic, Chad S. Dawson, Fengyuan Li | 2017-11-28 |
| 9745189 | MEMS device with isolation sub-frame structure | — | 2017-08-29 |
| 9720012 | Multi-axis inertial sensor with dual mass and integrated damping structure | Jun Tang, Margaret L. Kniffin | 2017-08-01 |
| 9663348 | MEMS device with isolation sub-frame structure | — | 2017-05-30 |
| 9637372 | Bonded wafer structure having cavities with low pressure and method for forming | Robert F. Steimle, Jeffrey D. Hanna, Ruben B. Montez | 2017-05-02 |