Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9776853 | Reducing MEMS stiction by deposition of nanoclusters | Robert F. Steimle | 2017-10-03 |
| 9663356 | Etch release residue removal using anhydrous solution | Srivatsa Kundalgurki, Gary Pfeffer | 2017-05-30 |
| 9637372 | Bonded wafer structure having cavities with low pressure and method for forming | Robert F. Steimle, Aaron A. Geisberger, Jeffrey D. Hanna | 2017-05-02 |
| 9550664 | Reducing MEMS stiction by increasing surface roughness | Robert F. Steimle | 2017-01-24 |