Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9776853 | Reducing MEMS stiction by deposition of nanoclusters | Ruben B. Montez | 2017-10-03 |
| 9637372 | Bonded wafer structure having cavities with low pressure and method for forming | Aaron A. Geisberger, Jeffrey D. Hanna, Ruben B. Montez | 2017-05-02 |
| 9550664 | Reducing MEMS stiction by increasing surface roughness | Ruben B. Montez | 2017-01-24 |