Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9728380 | Dual-plenum showerhead with interleaved plenum sub-volumes | Jonathan D. Mohn, Shawn M. Hamilton, Harald te Nijenhuis, Jeffrey E. Lorelli | 2017-08-08 |
| 9719169 | System and apparatus for flowable deposition in semiconductor fabrication | Jonathan D. Mohn, Harald te Nijenhuis, Shawn M. Hamilton, Ramkishan Rao Lingampalli | 2017-08-01 |