Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9847222 | Treatment for flowable dielectric deposition on substrate surfaces | Patrick Reilly, Nerissa Draeger, Bart J. van Schravendijk, Nicholas Muga Ndiege | 2017-12-19 |
| 9728380 | Dual-plenum showerhead with interleaved plenum sub-volumes | Jonathan D. Mohn, Shawn M. Hamilton, Jeffrey E. Lorelli, Kevin Madrigal | 2017-08-08 |
| 9719169 | System and apparatus for flowable deposition in semiconductor fabrication | Jonathan D. Mohn, Shawn M. Hamilton, Kevin Madrigal, Ramkishan Rao Lingampalli | 2017-08-01 |