Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9728380 | Dual-plenum showerhead with interleaved plenum sub-volumes | Shawn M. Hamilton, Harald te Nijenhuis, Jeffrey E. Lorelli, Kevin Madrigal | 2017-08-08 |
| 9719169 | System and apparatus for flowable deposition in semiconductor fabrication | Harald te Nijenhuis, Shawn M. Hamilton, Kevin Madrigal, Ramkishan Rao Lingampalli | 2017-08-01 |