Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9575413 | Exposure apparatus, exposure method, and device manufacturing method | Takuro Tsujikawa, Issei Funayoshi, Shinichi Egashira | 2017-02-21 |
| 9564780 | Rotary electric machine and rotor | Yukio Tsutsui, Motomichi Ohto | 2017-02-07 |