Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9575413 | Exposure apparatus, exposure method, and device manufacturing method | Takuro Tsujikawa, Atsushi Kawahara, Shinichi Egashira | 2017-02-21 |
IF
Issei Funayoshi
Overall (2017): #392,380 of 506,227Top 80%
1
Patents 2017