Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9575413 | Exposure apparatus, exposure method, and device manufacturing method | Takuro Tsujikawa, Atsushi Kawahara, Issei Funayoshi | 2017-02-21 |
SE
Shinichi Egashira
Overall (2017): #246,206 of 506,227Top 50%
1
Patents 2017