Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9703204 | Light source apparatus, optical apparatus, exposure apparatus, device manufacturing method, illuminating method, exposure method, and method for manufacturing optical apparatus | Hideki Komatsuda | 2017-07-11 |
| 9606447 | Reflective mirror, projection optical system, exposure apparatus, and device manufacturing method | Hiroshi Chiba | 2017-03-28 |
| 9541842 | Reflective image-forming optical system, exposure apparatus, and device manufacturing method | — | 2017-01-10 |