Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9606447 | Reflective mirror, projection optical system, exposure apparatus, and device manufacturing method | Yoshio Kawabe | 2017-03-28 |
| 9567674 | Film deposition apparatus and film deposition method | Norikazu Nakamura, Shoichi Miyahara | 2017-02-14 |