Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9760012 | Illumination device | — | 2017-09-12 |
| 9703204 | Light source apparatus, optical apparatus, exposure apparatus, device manufacturing method, illuminating method, exposure method, and method for manufacturing optical apparatus | Yoshio Kawabe | 2017-07-11 |
| 9557548 | Image-forming optical system, exposure apparatus, and device producing method | — | 2017-01-31 |