Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9785057 | Liquid jet and recovery system for immersion lithography | W. Thomas Novak, Douglas C. Watson | 2017-10-10 |
| 9658537 | Environmental system including vacuum scavenge for an immersion lithography apparatus | Michael Sogard | 2017-05-23 |
| 9632427 | Environmental system including a transport region for an immersion lithography apparatus | W. Thomas Novak, Douglas C. Watson | 2017-04-25 |
| 9618852 | Immersion lithography fluid control system regulating flow velocity of gas based on position of gas outlets | Derek Coon | 2017-04-11 |