Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9618852 | Immersion lithography fluid control system regulating flow velocity of gas based on position of gas outlets | Andrew J. Hazelton | 2017-04-11 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9618852 | Immersion lithography fluid control system regulating flow velocity of gas based on position of gas outlets | Andrew J. Hazelton | 2017-04-11 |