Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9785057 | Liquid jet and recovery system for immersion lithography | W. Thomas Novak, Andrew J. Hazelton | 2017-10-10 |
| 9644720 | Orientation independent focus mechanisms for laser radar | Alec Paul Robertson, Alexander Cooper | 2017-05-09 |
| 9632427 | Environmental system including a transport region for an immersion lithography apparatus | W. Thomas Novak, Andrew J. Hazelton | 2017-04-25 |