Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9657397 | Apparatus for treating surfaces of wafer-shaped articles | — | 2017-05-23 |
| 9633890 | Device for treating surfaces of wafer-shaped articles and gripping pin for use in the device | Ulrich Tschinderle, Thomas Wirnsberger, Franz Kumnig, Rainer Obweger | 2017-04-25 |
| 9597701 | Apparatus for treating surfaces of wafer-shaped articles | Rainer Obweger, Philipp Engesser | 2017-03-21 |
| 9548223 | Apparatus for treating surfaces of wafer-shaped articles | Dieter Frank, Robert Rogatschnig | 2017-01-17 |