Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9653328 | Method and apparatus for surface treatment using inorganic acid and ozone | Harald Okorn-Schmidt, Franz Kumning, Rainer Obweger | 2017-05-16 |
| 9633890 | Device for treating surfaces of wafer-shaped articles and gripping pin for use in the device | Ulrich Tschinderle, Andreas Gleissner, Franz Kumnig, Rainer Obweger | 2017-04-25 |