Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9748120 | Apparatus for liquid treatment of disc-shaped articles and heating system for use in such apparatus | Kevin Matthew Crabb, Vijay Kumar Badam | 2017-08-29 |
| 9597701 | Apparatus for treating surfaces of wafer-shaped articles | Rainer Obweger, Andreas Gleissner | 2017-03-21 |