Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9583363 | Processes and apparatus for preparing heterostructures with reduced strain by radial distension | Robert J. Falster, Vladimir V. Voronkov, John A. Pitney | 2017-02-28 |
| 9583364 | Processes and apparatus for preparing heterostructures with reduced strain by radial compression | Robert J. Falster, Vladimir V. Voronkov, John A. Pitney | 2017-02-28 |
| 9566687 | Center flex single side polishing head having recess and cap | Sumeet S. Bhagavat, Alex Chu, Ichiro Yoshimura, Yunbiao Xin, Roland R. Vandamme | 2017-02-14 |