Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9601395 | Methods for post-epitaxial warp prediction and control | Roland R. Vandamme | 2017-03-21 |
| 9566687 | Center flex single side polishing head having recess and cap | Peter Albrecht, Alex Chu, Ichiro Yoshimura, Yunbiao Xin, Roland R. Vandamme | 2017-02-14 |