Issued Patents 2017
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9829448 | Measurement of small features using XRF | Matthew Wormington, Alex Tokar, Alex Dikopoltsev | 2017-11-28 |
| 9666322 | X-ray source assembly | Asher Peled, Alex Brandt, Matthew Wormington | 2017-05-30 |
| 9632043 | Method for accurately determining the thickness and/or elemental composition of small features on thin-substrates using micro-XRF | Fouad Atrash, Alex Tokar, Olga Ostrovsky | 2017-04-25 |
| 9606073 | X-ray scatterometry apparatus | Alex Krokhmal, Alex Dikopoltsev, Matthew Wormington | 2017-03-28 |
| 9551677 | Angle calibration for grazing-incidence X-ray fluorescence (GIXRF) | Asher Peled | 2017-01-24 |