Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9786511 | Sequential infiltration synthesis for advanced lithography | Seth B. Darling, Jeffrey W. Elam, Qing Peng | 2017-10-10 |
| 9684234 | Sequential infiltration synthesis for enhancing multiple-patterning lithography | Seth B. Darling, Jeffrey W. Elam | 2017-06-20 |