Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9832853 | Alignment of light source focus | Matthew R. Graham, Steven Chang, Robert A. Bergstedt | 2017-11-28 |
| 9669334 | Material supply apparatus for extreme ultraviolet light source having a filter constructed with a plurality of openings fluidly coupled to a plurality of through holes to remove non-target particles from the supply material | Igor V. Fomenkov, Gregory O. Vaschenko, William Oldham | 2017-06-06 |
| 9620920 | High pulse repetition rate gas discharge laser | Walter Dale Gillespie, Thomas D. Steiger, Richard C. Ujazdowski | 2017-04-11 |