Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9785057 | Liquid jet and recovery system for immersion lithography | Andrew J. Hazelton, Douglas C. Watson | 2017-10-10 |
| 9632427 | Environmental system including a transport region for an immersion lithography apparatus | Andrew J. Hazelton, Douglas C. Watson | 2017-04-25 |
| 9587977 | Boresight error monitor for laser radar integrated optical assembly | Daniel Gene Smith | 2017-03-07 |