Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9711324 | Inert atmospheric pressure pre-chill and post-heat | William Davis Lee | 2017-07-18 |
| 9611540 | Electrostatic chuck shielding mechanism | Kan Ota, Stanley W. Stone | 2017-04-04 |