Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9611540 | Electrostatic chuck shielding mechanism | Kan Ota, Steve Drummond | 2017-04-04 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9611540 | Electrostatic chuck shielding mechanism | Kan Ota, Steve Drummond | 2017-04-04 |