Issued Patents 2017
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9815171 | Substrate holder, polishing apparatus, polishing method, and retaining ring | Satoru Yamaki, Hozumi Yasuda, Keisuke Namiki, Osamu Nabeya, Makoto Fukushima | 2017-11-14 |
| D799437 | Substrate retaining ring | Osamu Nabeya, Hozumi Yasuda, Makoto Fukushima, Keisuke Namiki, Satoru Yamaki | 2017-10-10 |
| D794585 | Retainer ring for substrate | Osamu Nabeya, Hozumi Yasuda, Makoto Fukushima, Keisuke Namiki, Satoru Yamaki | 2017-08-15 |
| D793976 | Substrate retaining ring | Makoto Fukushima, Hozumi Yasuda, Keisuke Namiki, Osamu Nabeya, Satoru Yamaki | 2017-08-08 |
| 9676076 | Polishing method and polishing apparatus | Keisuke Namiki, Hozumi Yasuda | 2017-06-13 |
| 9662764 | Substrate holder, polishing apparatus, and polishing method | Makoto Fukushima, Hozumi Yasuda, Keisuke Namiki, Osamu Nabeya, Satoru Yamaki | 2017-05-30 |
| 9573244 | Elastic membrane, substrate holding apparatus, and polishing apparatus | Makoto Fukushima, Hozumi Yasuda, Keisuke Namiki, Osamu Nabeya, Satoru Yamaki +1 more | 2017-02-21 |