Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9818585 | In situ plasma clean for removal of residue from pedestal surface without breaking vacuum | Richard Green, Cheng-Hsiung Tsai, Puneet Bajaj, David H. Loo | 2017-11-14 |
| 9728437 | High temperature chuck for plasma processing systems | Toan Q. Tran, Sultan Malik, Dmitry Lubomirsky, Satoru Kobayashi, Tae Seung Cho +2 more | 2017-08-08 |
| 9643324 | Multi-axis robot with remote drives facilitating hazardous energy isolation for use by home consumers | Xiaoyi Huang | 2017-05-09 |