Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9752981 | Apparatus with a spectral reflectometer for processing substrates | Dmitry Opaits | 2017-09-05 |
| 9735069 | Method and apparatus for determining process rate | Yassine Kabouzi, Luc Albarede, Andrew D. Bailey, III, Jorge Luque, Thorsten Lill | 2017-08-15 |
| 9627186 | System, method and apparatus for using optical data to monitor RF generator operations | John C. Valcore, Jr., Tony San | 2017-04-18 |