Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9733579 | Tooling configuration for electric/magnetic field guided acid profile control in a photoresist layer | Sang Ki Nam, Peng Xie, Ludovic Godet | 2017-08-15 |
| 9646807 | Sealing groove methods for semiconductor equipment | Dmitry Lubomirsky | 2017-05-09 |
| 9534289 | Plasma process chambers employing distribution grids having focusing surfaces thereon enabling angled fluxes to reach a substrate, and related methods | Jun Xue, Ludovic Godet | 2017-01-03 |