Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9548201 | Self-aligned multiple spacer patterning schemes for advanced nanometer technology | Ying Zhang, Uday Mitra, Srinivas D. Nemani, Hua Chung | 2017-01-17 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9548201 | Self-aligned multiple spacer patterning schemes for advanced nanometer technology | Ying Zhang, Uday Mitra, Srinivas D. Nemani, Hua Chung | 2017-01-17 |