Issued Patents 2017
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9760028 | Lithography system and method for processing a target, such as a wafer | — | 2017-09-12 |
| 9690215 | Interferometer module | Guido De Boer, Thomas Adrian Ooms, Godefridus Cornelius Antonius Couweleers | 2017-06-27 |
| 9678443 | Lithography system with differential interferometer module | Guido De Boer, Thomas Adriaan Ooms, Godefridus Cornelius Antonius Couweleers | 2017-06-13 |
| 9665014 | Charged particle lithography system with alignment sensor and beam measurement sensor | Paul IJmert Scheffers, Jan Andries Meijer, Erwin Slot, Vincent Sylvester Kuiper | 2017-05-30 |
| 9551563 | Multi-axis differential interferometer | Godefridus Cornelius Antonius Couweleers, Thomas Adriaan Ooms | 2017-01-24 |