Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9673058 | Method for etching features in dielectric layers | Scott Briggs, Eric A. Hudson, Leonid Belau, John Holland | 2017-06-06 |
| 9620377 | Technique to deposit metal-containing sidewall passivation for high aspect ratio cylinder etch | Eric A. Hudson, Kalman Pelhos, Hyung Joo Shin | 2017-04-11 |
| 9543148 | Mask shrink layer for high aspect ratio dielectric etch | Eric A. Hudson, Kalman Pelhos, Hyunjong Shim, Merrett Wong | 2017-01-10 |