Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9543148 | Mask shrink layer for high aspect ratio dielectric etch | Eric A. Hudson, Mark Wilcoxson, Kalman Pelhos, Hyunjong Shim | 2017-01-10 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9543148 | Mask shrink layer for high aspect ratio dielectric etch | Eric A. Hudson, Mark Wilcoxson, Kalman Pelhos, Hyunjong Shim | 2017-01-10 |