| 9852889 |
Systems and methods for controlling directionality of ions in an edge region by using an electrode within a coupling ring |
Michael C. Kellogg, Alexei Marakhtanov, Zhigang Chen, Felix Kozakevich, Kenneth Lucchesi |
2017-12-26 |
| 9761414 |
Uniformity control circuit for use within an impedance matching circuit |
Alexei Marakhtanov, Felix Kozakevich, Kenneth Lucchesi |
2017-09-12 |
| 9673058 |
Method for etching features in dielectric layers |
Scott Briggs, Eric A. Hudson, Leonid Belau, Mark Wilcoxson |
2017-06-06 |
| 9595424 |
Impedance matching circuit for operation with a kilohertz RF generator and a megahertz RF generator to control plasma processes |
Alexei Marakhtanov, Felix Kozakevich, Brett Jacobs |
2017-03-14 |
| 9564285 |
Hybrid feature etching and bevel etching systems |
Andreas Fischer |
2017-02-07 |
| 9536749 |
Ion energy control by RF pulse shape |
Alexei Marakhtanov, Zhigang Chen |
2017-01-03 |
