Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9735002 | Integrated apparatus for efficient removal of halogen residues from etched substrates | Kin Pong Lo, Brett Christian Hoogensen, Sandy M. Wen, Steven H. Kim | 2017-08-15 |