Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9659803 | Electrostatic chuck with concentric cooling base | Dmitry Lubomirsky, Samer Banna | 2017-05-23 |
| 9536710 | Tunable gas delivery assembly with internal diffuser and angular injection | Vladimir Knyazik, Samer Banna, Waheb Bishara | 2017-01-03 |