Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9852889 | Systems and methods for controlling directionality of ions in an edge region by using an electrode within a coupling ring | Michael C. Kellogg, Alexei Marakhtanov, John Holland, Zhigang Chen, Felix Kozakevich | 2017-12-26 |
| 9761414 | Uniformity control circuit for use within an impedance matching circuit | Alexei Marakhtanov, Felix Kozakevich, John Holland | 2017-09-12 |