Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9788405 | RF power delivery with approximated saw tooth wave pulsing | Katsumasa Kawasaki, Sergio Fukuda Shoji, Daisuke Shimizu | 2017-10-10 |
| 9741539 | RF power delivery regulation for processing substrates | Katsumasa Kawasaki, Sergio Fukuda Shoji | 2017-08-22 |