Issued Patents 2017
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9831063 | Ion implantation compositions, systems, and methods | Oleg Byl, Ying Tang, Richard S. Ray | 2017-11-28 |
| 9764298 | Apparatus and method for preparation of compounds or intermediates thereof from a solid material, and using such compounds and intermediates | Oleg Byl, Edward E. Jones, Chiranjeevi Pydi | 2017-09-19 |
| 9754786 | Method and apparatus for enhanced lifetime and performance of ion source in an ion implantation system | Robert Kaim, Anthony M. Avila, Richard S. Ray | 2017-09-05 |
| 9685304 | Isotopically-enriched boron-containing compounds, and methods of making and using same | Robert Kaim, Oleg Byl, Sharad N. Yedave, Edward E. Jones, Peng Zou +3 more | 2017-06-20 |
| 9666435 | Apparatus and process for integrated gas blending | Jeffrey J. Homan, Jose I. Arno | 2017-05-30 |
| 9631778 | Endpoint determination for capillary-assisted flow control | Anthony M. Avila, Michael J. Wodjenski, Joseph R. Despres, Thomas H. Baum | 2017-04-25 |