Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9754786 | Method and apparatus for enhanced lifetime and performance of ion source in an ion implantation system | Robert Kaim, Joseph D. Sweeney, Richard S. Ray | 2017-09-05 |
| 9631778 | Endpoint determination for capillary-assisted flow control | Joseph D. Sweeney, Michael J. Wodjenski, Joseph R. Despres, Thomas H. Baum | 2017-04-25 |