Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9709893 | Exposure method using electron beam and substrate manufacturing method using the same | Sook Hyun Lee, Shuichi Tamamushi, So-eun Shin, Inkyun SHIN | 2017-07-18 |
| 9583305 | Exposure method using control of settling times and methods of manufacturing integrated circuit devices by using the same | Yong Seok Jung, Shuichi Tamamushi, In-Hwan Noh, In-Kyun Shin, Sang-Hee Lee | 2017-02-28 |