Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9709893 | Exposure method using electron beam and substrate manufacturing method using the same | Sook Hyun Lee, Shuichi Tamamushi, Inkyun SHIN, Jin Choi | 2017-07-18 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9709893 | Exposure method using electron beam and substrate manufacturing method using the same | Sook Hyun Lee, Shuichi Tamamushi, Inkyun SHIN, Jin Choi | 2017-07-18 |