Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9671686 | Exposure methods using e-beams and methods of manufacturing masks and semiconductor devices therefrom | Jin Sun Karoline Choi, Byoung-Sup Ahn, Sang-Hee Lee | 2017-06-06 |
| 9583305 | Exposure method using control of settling times and methods of manufacturing integrated circuit devices by using the same | Yong Seok Jung, Shuichi Tamamushi, In-Hwan Noh, Sang-Hee Lee, Jin Choi | 2017-02-28 |